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Updated: May 25, 2026
Light Enhanced Hydrofluoric Acid Passivation: A Sensitive Technique for Detecting Bulk Silicon Defects
Published on: January 4, 2016
Detection of hydrofluoric acid by a SiO2 sol-gel coating fiber-optic probe based on reflection-based localized
I-Cherng Chen1, Shiu-Shiung Lin, Tsao-Jen Lin
1Micro Systems Technology Center, ITRI South, Industrial Technology Research Institute, Tainan 709, Taiwan. Eugenechen@itri.org.tw
Abstract:
A novel fiber-optic probe based on reflection-based localized surface plasmon resonance (LSPR) was developed to quantify the concentration of hydrofluoric acid (HF) in aqueous solutions. The LSPR sensor was constructed with a gold nanoparticle-modified PMMA fiber, integrated with a SiO(2) sol-gel coating. This fiber-sensor was utilized to assess the relationship between HF concentration and SiO(2) sol-gel layer etching reduction. The results demonstrated the LSPR sensor was capable of detecting HF-related erosion of hydrofluoric acid solutions of concentrations ranging from 1% to 5% using Relative RI Change Rates. The development of the LSPR sensor constitutes the basis of a detector with significant sensitivity for practical use in monitoring HF solution concentrations.
