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Electron cyclotron resonance ion source plasma chamber studies using a network analyzer as a loaded cavity probe

V Toivanen1, O Tarvainen, C Lyneis

  • 1Department of Physics, University of Jyväskylä, Jyväskylä 40500, Finland. ville.toivanen@jyu.fi

The Review of Scientific Instruments
|March 3, 2012
PubMed

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