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Updated: May 24, 2026

Non-equilibrium Microwave Plasma for Efficient High Temperature Chemistry
07:17

Non-equilibrium Microwave Plasma for Efficient High Temperature Chemistry

Published on: August 1, 2017

Electron cyclotron resonance plasma production by using pulse mode microwaves and dependences of ion beam current and

Ryutaro Kiriyama1, Tomoya Takenaka, Yousuke Kurisu

  • 1Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita-shi, Osaka 565-0871, Japan. kiriyama@i-beam.jp

The Review of Scientific Instruments
|March 3, 2012
PubMed

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