Extraction of negative hydrogen ions from a compact 14 GHz microwave ion source

A pair of permanent magnets has formed enough intensity to realize electron cyclotron resonance condition for a 14 GHz microwave in a 2 cm diameter 9 cm long alumina discharge chamber. A three-electrode extraction system assembled in a magnetic shielding has formed a stable beam of negative hydrogen ions (H(-)) in a direction perpendicular to the magnetic field. The measured H(-) current density was about 1 mA∕cm(2) with only 50 W of discharge power, but the beam intensity had shown saturation against further increase in microwave power. The beam current decreased monotonically against increasing pressure.