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Development of low-energy and high-current-density ion beam system

H Sakakita1, S Kiyama, Y Hirano

  • 1Innovative Plasma Technologies Group, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba 305-8568, Japan. h.sakakita@aist.go.jp

The Review of Scientific Instruments
|March 3, 2012
PubMed

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