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Resonant Magnetic Field Sensors Based On MEMS Technology
Agustín L Herrera-May1, Luz A Aguilera-Cortés, Pedro J García-Ramírez
1Centro de Investigación en Micro y Nanotecnología, Universidad Veracruzana / Calzada Ruiz Cortínes 455, 94292, Boca del Río, Veracruz, Mexico;
Sensors (Basel, Switzerland)
|March 13, 2012
Summary
Microelectromechanical systems (MEMS) technology enables small, efficient resonant magnetic field sensors. These sensors utilize Lorentz force and various sensing techniques for diverse applications.
Area of Science:
- Physics
- Electrical Engineering
- Materials Science
Background:
- Microelectromechanical systems (MEMS) integrate magnetic field sensors with electronics, offering size, weight, power, cost, sensitivity, and resolution benefits.
- Resonant magnetic field sensors leverage MEMS technology to detect external magnetic fields via Lorentz force-induced displacement of resonant structures.
Purpose of the Study:
- To review and discuss resonant magnetic field sensors based on MEMS technology.
- To analyze the operation mechanisms, advantages, and drawbacks of optical, capacitive, and piezoresistive sensing techniques for MEMS magnetic field sensors.
Main Methods:
- Exploitation of the Lorentz force to detect magnetic fields through structural displacement.
- Measurement of displacement using optical, capacitive, and piezoresistive sensing techniques.
- Review of sensor operation, benefits, and limitations for each sensing method.
Main Results:
- Optical sensing offers electromagnetic interference (EMI) immunity and simpler read-out electronics.
- Piezoresistive sensing is characterized by straightforward fabrication and standard packaging.
- Each sensing technique presents unique trade-offs in performance and implementation.
Conclusions:
- MEMS magnetic field sensors are viable for automotive, military, medical, telecommunications, oceanographic, spatial, and environmental applications.
- Future developments will focus on multi-parameter sensing integration on a single chip, including magnetic fields, pressure, and temperature.
Keywords:
Lorentz forceMicroelectromechanical Systems (MEMS)magnetic field sensorsresonant structuresMore Related Videos
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