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Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
Published on: August 15, 2014
Khaled Sadek1, Jonathan Lueke, Walied Moussa
1Department of Mechanical Engineering, University of Alberta / University of Alberta, Edmonton, AB, T6G 2G8, Canada; E-Mails: kmahmoud@ualberta.ca (K.S.); lueke@ualberta.ca (J.L.).
This study investigates Radio Frequency Microelectromechanical Systems (RF MEMS) switch reliability using 3D finite element analysis. Findings show mechanical design and residual stress control enhance performance across various temperatures and frequencies.
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