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Standard CMOS Fabrication of a Sensitive Fully Depleted Electrolyte-Insulator-Semiconductor Field Effect Transistor

Gil Shalev1, Ariel Cohen, Amihood Doron

  • 1Intel Research Israel, Intel Electronics, Jerusalem 91031, Israel; E-Mails: gil.shalev@intel.com (G.S.); ariel.cohen@intel.com (A.C.); amihood.doron@intel.com (A.D.); andrew.machauf@intel.com (A.M.); moran.horesh@intel.com (M.H.); udi.virobnik@intel.com (U.V.); daniela.ullien@intel.com (D.U).

Sensors (Basel, Switzerland)
|March 13, 2012
PubMed

Keywords:
CMOSEISFETbiosensorsfully depleted

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