Related Experiment Video
Updated: May 24, 2026

Use of Sacrificial Nanoparticles to Remove the Effects of Shot-noise in Contact Holes Fabricated by E-beam Lithography
Published on: February 12, 2017
Improved light extraction from large-area vertical light-emitting diodes with deep hole-patterns using nanosphere
Ho-Myoung An1, Ji Won Yang, Jae In Sim
1School of Electrical Engineering, Korea University, Anam-dong 5-ga, Seongbuk-gu, Seoul 136-701, Korea.
Improved light extraction from vertical light emitting diodes (VLEDs) is achieved using deep hole patterns. This nanostructure fabrication method significantly boosts light output power for enhanced LED performance.
Area of Science:
- Optoelectronics
- Materials Science
- Nanotechnology
Background:
- Light extraction efficiency is a critical parameter for vertical light emitting diodes (VLEDs).
- Existing VLED designs often face limitations in maximizing light output due to internal reflection and absorption.
Purpose of the Study:
- To develop and evaluate an improved light extraction method for large-area VLEDs.
- To investigate the impact of deep hole patterns fabricated via nanosphere lithography on VLED performance.
Main Methods:
- Fabrication of ordered deep-hole patterns on n-type Gallium Nitride (GaN) surfaces using nanosphere lithography.
- Utilized a 150 nm Nickel (Ni) dot mask for deep etching of periodic hole patterns (360 nm diameter, 1.0 and 1.5 µm depths).
- Compared light output power of patterned VLEDs against a reference VLED without patterns.
Main Results:
- VLEDs with 1.0 µm and 1.5 µm deep hole patterns exhibited 4.13x and 4.86x higher light output power, respectively, compared to the reference.
- Enhancements attributed to light scattering from hole sidewalls and increased surface area for light emission.
- Potential reduction in photon reabsorption within the n-GaN layer for deeper patterns.
Conclusions:
- Deep hole patterns fabricated using nanosphere lithography significantly improve light extraction efficiency in VLEDs.
- The proposed method offers a viable strategy for enhancing the performance of large-area VLEDs.
- Further investigation into photon reabsorption effects could optimize future VLED designs.
More Related Videos
10:25Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
10:41Enhanced Electron Injection and Exciton Confinement for Pure Blue Quantum-Dot Light-Emitting Diodes by Introducing Partially Oxidized Aluminum Cathode
Published on: May 31, 2018