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Step-index optical waveguide produced by multi-step ion implantation in LiNbO3
G B Montanari1, P De Nicola, S Sugliani
1Laboratorio di Micro e Submicro Tecnologie abilitanti dell’Emilia-Romagna, Via P. Gobetti 101, I-40129 Bologna, Italy. montanari@bo.imm.cnr.it
Optics Express
|March 16, 2012
Summary
Annealing temperature affects ion-implanted Lithium Niobate (LiNbO3) waveguides. Fabricated waveguides show step-index profiles and confine light within the damaged layer, indicating suitability for device fabrication.
Area of Science:
- Materials Science
- Optical Engineering
- Solid State Physics
Background:
- Lithium Niobate (LiNbO3) is a key material for integrated optics.
- Ion implantation is a common technique for fabricating optical waveguides in LiNbO3.
- Controlling waveguide properties through post-implantation annealing is crucial for device performance.
Purpose of the Study:
- To analyze the impact of annealing temperature on the refractive index, material attenuation, and damage fraction of multi-step ion-implanted LiNbO3 waveguides.
- To design and fabricate LiNbO3 waveguides with a flat damage depth profile for reliable characterization.
- To evaluate the suitability of these waveguides for optical device applications.
Main Methods:
- Fabrication of multi-step ion-implanted LiNbO3 waveguides.
- Systematic variation of post-implantation annealing temperatures.
- Characterization of refractive index profiles, material attenuation at 632.8 nm, and damage fractions.
- Design of an almost flat damage depth profile to minimize profile shape uncertainties.
Main Results:
- The study confirmed predicted step-index profiles in the fabricated optical waveguides.
- Light confinement was observed within the designed damaged layer of the LiNbO3 waveguides.
- Low measured attenuation, less than 0.8 dB/cm at 632.8 nm, was achieved.
- Refractive index, material attenuation, and damage fractions were analyzed as functions of annealing temperatures.
Conclusions:
- The annealing temperature significantly influences the optical and physical properties of ion-implanted LiNbO3 waveguides.
- The fabricated waveguides exhibit properties suitable for optical device applications due to effective light confinement and low loss.
- The designed flat damage depth profile facilitated accurate characterization of waveguide properties.
