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Ultra-precise characterization of LCLS hard X-ray focusing mirrors by high resolution slope measuring deflectometry

Frank Siewert1, Jana Buchheim, Sébastien Boutet

  • 1Helmholtz Zentrum Berlin, BESSY-II, Institute for Nanometre Optics and Technology, Albert-Einstein-Str. 15, 12489 Berlin, Germany. frank.siewert@helmholtz-berlin.de

Optics Express
|March 16, 2012
PubMed

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