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Compact MEMS-driven pyramidal polygon reflector for circumferential scanned endoscopic imaging probe
Xiaojing Mu1, Guangya Zhou, Hongbin Yu
1Department of Mechanical Engineering, Micro and Nano System Initiative Lab, National University of Singapore, 9 Engineering Drive 1, Singapore 117576, Singapore.
A new microelectromechanical systems (MEMS) platform with an electrothermal chevron-beam actuator enables large-angle scanning for circumferential imaging. This compact device is ideal for endoscopic optical coherence tomography (EOCT) applications like intravascular cancer detection.
Area of Science:
- Engineering
- Materials Science
- Biomedical Engineering
Background:
- Microelectromechanical systems (MEMS) are crucial for miniaturized devices.
- Electrothermal actuators offer precise motion control.
- Circumferential scanning is needed for advanced imaging techniques.
Purpose of the Study:
- To develop a novel MEMS platform for circumferential scanning.
- To enhance light beam scanning capabilities for imaging applications.
- To create a compact actuator suitable for endoscopic procedures.
Main Methods:
- Utilized microassembly technology to construct the MEMS platform.
- Integrated a MEMS chevron-beam microactuator with a micro-reflector.
- Employed a two-stage electrothermal cascaded chevron-beam driving mechanism for displacement amplification.
Main Results:
- Successfully developed a novel electrothermal chevron-beam actuator based MEMS platform.
- Achieved large-angle rotation of a micro-pyramidal polygon reflector for light beam scanning.
- Demonstrated an ultra-compact platform with circumferential imaging capability.
Conclusions:
- The developed MEMS platform offers a viable solution for circumferential scanning.
- The device's compact nature and imaging capabilities make it suitable for endoscopic optical coherence tomography (EOCT).
- Potential applications include intravascular cancer detection.
