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Updated: May 23, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
Linghua Wang1, Wim Bogaerts, Pieter Dumon
1Photonics Research Group (INTEC), Ghent University–IMEC, Sint-Pietersnieuwstraat 41, 9000 Gent, Belgium. Linghua.wang@intec.ugent.be
Athermal arrayed waveguide gratings (AWGs) were developed using silicon-on-insulator (SOI) and a polymer overlay. This novel design significantly reduces temperature-dependent wavelength shifts for stable optical device performance.
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