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Updated: May 23, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
A Polo1, V Kutchoukov, F Bociort
1Optics Research Group, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands. a.polo@tudelft.nl
A novel phase retrieval algorithm enhances Hartmann wavefront sensor accuracy, achieving wavefront errors one order of magnitude smaller than traditional centroid methods for precise phase structure measurement.
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