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Frank Burmeister1, Uwe D Zeitner, Stefan Nolte

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We developed new hybrid optics for precise focusing of ultrashort laser pulses in polymers. This technology enhances direct laser writing via two-photon polymerization with improved resolution and working distance.

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Area of Science:

  • Optics and Photonics
  • Materials Science
  • Laser Technology

Background:

  • Direct laser writing via two-photon polymerization requires precise focusing of ultrashort laser pulses.
  • Achieving high numerical aperture (NA) and large working distances simultaneously is challenging.
  • Aberration correction is crucial for high-resolution 3D microstructuring.

Purpose of the Study:

  • To design and demonstrate novel immersion hybrid optics for ultrashort laser pulse focusing.
  • To achieve well-corrected focusing over a large working distance with high NA.
  • To improve direct laser writing resolution in polymers.

Main Methods:

  • Combining an aplanatic solid immersion lens (ASIL) with a diffractive optical element (DOE).
  • Utilizing immersion microscopy principles for enhanced focusing.
  • Characterizing optical performance including working distance, NA, and internal dispersion.

Main Results:

  • The hybrid optics provide a working distance of 577 μm with NA=1.33.
  • Low internal dispersion was achieved, enabling precise focusing.
  • Demonstrated improved achievable structure sizes compared to commercial objectives.

Conclusions:

  • The developed immersion hybrid optics are effective for high-resolution direct laser writing.
  • This technology offers significant advantages for 3D polymer microstructuring.
  • The combination of ASIL and DOE provides a robust solution for aberration correction.