An in-vacuum x-ray diffraction microscope for use in the 0.7-2.9 keV range

Area of Science:

• Materials Science
• Optics
• Nanotechnology

Background:

• Coherent x-ray diffraction imaging (CXDI) is a powerful technique for nanoscale structural analysis.
• Achieving high resolution requires stable instrumentation and precise control of optics relative to the sample.

Purpose of the Study:

• To introduce a novel in-vacuum coherent x-ray diffraction microscope.
• To demonstrate its capabilities for various imaging modes and assess its stability.

Main Methods:

• Installation of a dedicated in-vacuum microscope at the 2-ID-B beamline (Advanced Photon Source) for 0.7-2.9 keV x-rays.
• Implementation of plane wave illumination, Fresnel diffractive imaging, and ptychography.
• Utilizing active feedback systems and capacitance micrometry for stability measurements.

Main Results:

• The microscope supports multiple CXDI implementations with flexible probe configurations.
• Active feedback systems achieved sub-5 nm stability for optics-to-sample displacement.
• In-vacuum operation facilitates long exposures, high signal-to-noise, and large dynamic range measurements.

Conclusions:

• The developed in-vacuum CXDI microscope offers exceptional stability and versatility for nanoscale imaging.
• It enables advanced structural characterization with high fidelity and resolution.
• The instrument's performance is validated by experimental results, showcasing its potential for scientific discovery.