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Picometer-Precision Atomic Position Tracking through Electron Microscopy

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Effect of specimen misalignment on local structure analysis using annular dark-field imaging.

Yeong-Gi So¹, Koji Kimoto

¹National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan. so.yeonggi@nims.go.jp

Journal of Electron Microscopy

|May 8, 2012

Summary

Crystal tilt in scanning transmission electron microscopy (STEM) with annular dark-field (ADF) imaging causes artifacts. Using a large convergence angle improves atomic position accuracy and spatial resolution by minimizing these imaging errors.

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Area of Science:

Materials Science
Physics
Electron Microscopy

Background:

Annular dark-field (ADF) imaging in scanning transmission electron microscopy (STEM) is crucial for atomic resolution.
Crystal tilt, a slight misalignment, can introduce artifacts in STEM-ADF images, complicating analysis.

Purpose of the Study:

To investigate the impact of crystal tilt on ADF imaging in STEM.
To determine how probe convergence angle affects image fidelity and artifact formation.

Main Methods:

Simulated STEM-ADF imaging under varying crystal tilt conditions.
Analysis of image artifacts, specifically spot displacements, for different convergence angles.
Utilized multislice simulation to model electron scattering and image formation.

Main Results:

Small convergence angles in STEM-ADF imaging lead to spot shifts and breakdown of the incoherent imaging approximation due to crystal tilt.
Large convergence angles result in bright spot positions accurately reflecting atomic column positions.
Multislice simulations revealed that a smaller depth of focus at large convergence angles enhances interpretability.

Conclusions:

A large convergence angle in STEM-ADF imaging mitigates crystal tilt artifacts.
This approach enables more accurate measurement of atomic positions.
Improved spatial resolution and reliable atomic site determination are achieved with larger convergence angles.