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Scanning Electron Microscopy

Scanning Electron Microscopy

A scanning electron microscope (SEM) is used to study the surface features of a sample by using an electron beam that scans the sample surface in a two-dimensional manner. Typically, areas between ~1 centimeter to 5 micrometers in width can be imaged. SEM can be used to image bacteria, viruses, tissues as well as larger samples like insects. Conventional SEM gives a magnification ranging from 20X to 30,000X and spatial resolution of 50 to 100 nanometers.
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The early pioneers of microscopy opened a window into the invisible world of microorganisms. In 1830, Joseph Jackson Lister created an essentially modern light microscope. The 20th century saw the development of microscopes that leveraged nonvisible light, such as fluorescence microscopy that uses an ultraviolet light source and electron microscopy that uses short-wavelength electron beams. These advances significantly improved magnification, image resolution, and contrast. By comparison, the...

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Frequency Mixing Magnetic Detection Scanner for Imaging Magnetic Particles in Planar Samples

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Development of a 100 MHz scan controller for the electron microscope.

Ovidiu Cretu¹, Koji Kimoto¹

¹Center for Basic Research on Materials (CBRM), National Institute for Materials Science (NIMS), Namiki 1-1, Tsukuba, Ibaraki 305-0044, Japan.

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|December 6, 2025

Summary

This summary is machine-generated.

A new electron microscope scan controller achieves 0.9 ms frame times using programmable hardware and spiral scans. This high-speed imaging reduces distortions and optimizes electron dose for better image quality.

Keywords:

Distortions Dose FPGA High-speed scanning Scan controller Spiral

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Area of Science:

Materials Science
Physics
Engineering

Background:

Electron microscopy requires high-speed imaging to capture dynamic processes.
Limitations in scan coils and high-speed scanning cause image distortions.
Optimizing electron dose is crucial for maintaining image quality and sample integrity.

Purpose of the Study:

To develop a 100 MHz high-speed scan controller for electron microscopes.
To minimize image distortions during high-speed electron microscopy.
To implement a dose-driven acquisition method for optimized electron dose distribution.

Main Methods:

Utilized programmable hardware for controller development.
Implemented a spiral scan pattern to overcome scan coil limitations.
Optimized regular (sawtooth) scanning using advanced signal and timing control.
Developed a dose-driven acquisition method.

Main Results:

Achieved undistorted image acquisition with a frame time of 0.9 ms.
Successfully reduced image distortions at high scanning speeds.
Demonstrated an optimized electron dose distribution while preserving detector contrast.

Conclusions:

The new controller enables high-speed, high-quality imaging in electron microscopy.
Spiral scan patterns and optimized sawtooth scanning effectively mitigate distortions.
Dose-driven acquisition enhances imaging efficiency and sample preservation.