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Comparison between Deflection and Vibration Characteristics of Rectangular and Trapezoidal profile Microcantilevers

Mohd Zahid Ansari1, Chongdu Cho, Jooyong Kim

  • 1Department of Mechanical Engineering, Inha University, 253 Yonghyun-dong, Nam-Ku, Incheon, 402-751 Republic of Korea.

Sensors (Basel, Switzerland)
|May 11, 2012
PubMed
Summary

Trapezoidal microcantilevers show enhanced sensitivity for sensor applications. This study compared rectangular and trapezoidal designs, finding trapezoidal profiles superior for improved physical, biological, and chemical sensing.

Keywords:
DeflectionMicrocantileverResonant FrequencySensorSurface stress

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