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Broadband light source shearing interferometer using Savart plate and angular scanning technique
Shyh-Tsong Lin1, Sheng-Lih Yeh, Minh-Han Hxieh
1Department of Electro-optical Engineering, National Taipei University of Technology, 1, Sec.3, Chung-Hsiao East Road, Taipei 10608, Taiwan. f10402@ntut.edu.tw
Optics Letters
|June 5, 2012
Summary
This study introduces a novel shearing interferometer for precise slope contour measurements. The method utilizes a Savart plate and angular scanning to analyze surface topography effectively.
Area of Science:
- Optical Metrology
- Interferometry
- Surface Analysis
Background:
- Accurate surface slope measurement is crucial for various scientific and engineering applications.
- Traditional interferometry methods can be complex or limited in scope.
Purpose of the Study:
- To propose and validate a novel shearing interferometer for slope contour measurements.
- To demonstrate the feasibility of using a broadband light source, Savart plate, and angular scanning.
Main Methods:
- A shearing interferometer was designed using a broadband light source and a Savart plate.
- The Savart plate laterally displaces wavefronts reflected from the surface.
- Slope contours were determined by analyzing fringe shifts during angular scanning of the Savart plate.
Main Results:
- An experimental setup was constructed and tested.
- The experimental results confirmed the validity and feasibility of the proposed interferometer.
- The technique successfully measured slope contours of the detected surface.
Conclusions:
- The developed shearing interferometer offers a viable method for surface slope contour measurement.
- The combination of a Savart plate and angular scanning provides an effective approach.
- This technique has potential applications in surface characterization and metrology.
