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Updated: May 21, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Measurement of three-dimensional deformation vectors with digital holography and stereophotogrammetry
Robert Schwede1, Holger Babovsky, Armin Kiessling
1Institute of Applied Optics, Friedrich Schiller University Jena, Froebelstieg 1, 07743 Jena, Germany. robert.schwede@uni‑jena.de
Abstract:
We present a method to determine the three-dimensional (3D) deformation vectors of an arbitrary stressed object by combining stereophotogrammetry and digital holography in a setup with four cameras. The resulting data consists of a dense 3D point cloud, where every point is associated with a deformation vector. Our method is able to calculate the deformation without prior knowledge of the sensitivity vectors or the object surface. In the experimental setup only the base distance of the cameras needs to be known.
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