Related Experiment Video
Updated: May 21, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
Environmental transmission electron microscopy in an aberration-corrected environment
Thomas W Hansen1, Jakob B Wagner
1Center for Electron Nanoscopy, Technical University of Denmark, DK-2800 Kgs. Lyngby, Denmark. twh@cen.dtu.dk
Environmental transmission electron microscopy (ETEM) allows new insights into materials science by studying gas-sample interactions. This research investigated how gas atmospheres affect high-resolution imaging and spectroscopy in ETEM.
Area of Science:
- Materials Science
- Analytical Chemistry
- Physics
Background:
- Environmental transmission electron microscopy (ETEM) is increasingly used in materials science.
- Understanding gas-sample interactions is crucial for chemical reactions and imaging.
- Gas in the microscope's pole-piece gap affects electron waves and imaging.
Purpose of the Study:
- To investigate the effects of gas presence on imaging and spectroscopy in ETEM.
- To understand how gas atmospheres influence high-resolution electron microscopy.
- To explore new possibilities in materials science research using ETEM.
Main Methods:
- Utilized an FEI Titan environmental transmission electron microscope.
- Employed a monochromator and aberration corrector on the objective lens.
- Investigated the impact of a gaseous atmosphere within the microscope's pole-piece gap.
Main Results:
- The presence of gas in the environmental cell alters both incoming and outgoing electron waves.
- Gas is not spatially localized, filling the entire pole-piece gap.
- Observed significant effects on high-resolution imaging and spectroscopy due to the gas atmosphere.
Conclusions:
- ETEM offers novel approaches for studying chemical reactions and electron-gas interactions.
- The gaseous environment significantly impacts electron wave propagation and imaging.
- Further research with ETEM can advance materials science and chemical analysis.
Related Concept Videos
Transmission Electron Microscopy
Overview of Electron Microscopy
Overview of Microscopy Techniques
Preparation of Samples for Electron Microscopy
Electron Microscope Tomography and Single-particle Reconstruction
Electron Tomography
Electron tomography can be performed either in TEM or STEM (scanning transmission...
Immunogold Electron Microscopy
