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Updated: May 21, 2026

Picometer-Precision Atomic Position Tracking through Electron Microscopy
Published on: July 3, 2021
Correcting scanning instabilities from images of periodic structures
Nadi Braidy1, Yann Le Bouar, Sorin Lazar
1Département de génie chimique et de génie biotechnologique, Université de Sherbrooke. 2500 Boul. de l'Université, Sherbrooke, Québec, Canada J1H 2R1. nadi.braidy@usherbrooke.ca
Abstract:
A method for measuring and correcting the row displacement errors in lattice images acquired using scanning based methods is presented. This type of distortion is apparent in lattice-resolved images acquired using scanning-based techniques such as scanning transmission electron microscopy (STEM) and translates to vertical streaks convolving every feature in Fourier space. This paper presents a method to measure and correct the distortion based on the phase analysis of the streaks in Fourier space. The validity and the precision of the method is demonstrated using a model image and two experimental STEM images of Si <110> thin film and a 5 nm CoPt disordered nanocrystal. The algorithm is implemented in a freely available Digital Micrograph™ script.

