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High-speed Lissajous-scan atomic force microscopy: scan pattern planning and control design issues.

A Bazaei1, Yuen K Yong, S O Reza Moheimani

  • 1School of Electrical Engineering and Computer Science, The University of Newcastle, Callaghan, NSW 2308, Australia. ali.bazaei@newcastle.edu.au

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Summary

This study introduces Lissajous patterns for faster scanning in microscopy, overcoming limitations of traditional sawtooth waveforms. The new method significantly improves tracking performance and image resolution for high-speed scanning applications.

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Area of Science:

  • Scanning Probe Microscopy
  • Nanotechnology
  • Control Systems Engineering

Background:

  • High-speed scanning in applications like scanning probe microscopy is limited by non-smooth waveforms (e.g., sawtooth) that excite mechanical resonances.
  • These resonances restrict scan range and bandwidth, leading to image distortion during fast raster scanning.

Purpose of the Study:

  • To propose and analyze a nonlinear, smooth closed curve (Lissajous pattern) for significantly faster scanning operations compared to conventional patterns.
  • To develop systematic methodologies for determining scan parameters based on a closed-form measure of image resolution for Lissajous patterns.

Main Methods:

  • Implementation of the Lissajous pattern non-raster scan method on an atomic force microscope using internal model controllers (IMC).
  • Inclusion of higher-order harmonic oscillators within IMC controllers to mitigate tracking errors caused by actuator nonlinearities.
  • Comparison of the proposed IMC controller with traditional IMC and integral controllers for tracking performance and noise rejection.

Main Results:

  • The Lissajous pattern enables much faster scanning operations than ordinary scan patterns.
  • A closed-form measure for image resolution facilitates systematic determination of scan parameters.
  • The enhanced IMC controller demonstrates significant improvement in tracking performance over traditional IMC methods.
  • The proposed IMC controller exhibits superior tracking performance compared to integral controllers, especially concerning noise rejection.

Conclusions:

  • Lissajous patterns offer a viable solution for achieving high-speed scanning in microscopy, overcoming the limitations of traditional waveforms.
  • The developed IMC strategy with harmonic oscillators effectively reduces tracking errors and enhances performance in nonlinear systems.
  • This approach provides a robust and efficient method for improving scan speed and image quality in scanning probe microscopy.