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Updated: May 19, 2026

A Standard and Reliable Method to Fabricate Two-Dimensional Nanoelectronics
Published on: August 28, 2018
Fabrication of dielectric nanocubes in ordered structure by capillary force assisted self-assembly method and their
Ken-Ichi Mimura1, Feng Dang, Kazumi Kato
1National Institute of Advanced Industrial Science and Technology (AIST), 2266-98 Anagahora, Shimoshidami, Moriyama-ku, Nagoya, 463-8560, Japan.
Abstract:
Ordered structures of barium titanate (BT) nanocubes, strontium titanate (ST) nanocubes and BT/ST nanocubes mixture were directly fabricated on Si and Pt-coated Si substrates using a capillary force assisted assembly method. The morphology of self-assembled structures was observed using field emission scanning electron microscopy (FE-SEM) and scanning probe microscopy (SPM). It was revealed that nanocubes were arranged with various degrees of ordering to develop multilayer and monolayer regions at the surface of substrates. The elemental mapping of the structure consisting of the nanocubes mixture was also investigated by transmission electron microscopy (TEM) with an energy dispersive X-ray spectroscopy (EDX). It was revealed that BT and ST nanocubes coexisted homogeneously in the structure and had possibility to be arranged in order to each other. The piezoresponse properties obtained by scanning probe microscopy (SPM) indicated that the hetero-interface between BT and ST nanocubes would introduce anomaly in piezoelectric properties.

