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Updated: May 19, 2026

Aerosol-assisted Chemical Vapor Deposition of Metal Oxide Structures: Zinc Oxide Rods
Published on: September 14, 2017
Sensitivity-tuned CO gas sensors with tailored Ga-doping in ZnO nanowires
Kyoungwon Kim1, Deuk-Hee Lee, Dawoon Jeong
1Electronic Materials Center, Korea Institute of Science and Technology, P.O. Box 131, Cheongryang, Seoul 130-650, Korea.
Abstract:
Sensitivity-customization of zinc oxide (ZnO) nanowire (NW) gas sensors has been demonstrated by controlling Ga-doping, thereby tuning the resistance of the NWs. Both un-doped and 5 weight% Ga-doped ZnO (GZO) NWs are synthesized for the highly sensitive sensing within a narrow detection window and a less sensitive one within an expanded window, respectively. We have employed hot-walled pulsed laser deposition (HW-PLD) for the NW synthesis. With CO gas injection, the resistance reduction of NWs is detected and analyzed in a self-designed gas chamber that guarantees the precise control of gas flow and, gas concentration, as well as temperature. NW sensitivity is proportional to the sensing temperature and inversely proportional to the doping concentration resulting in widening the sensing window up to 230 times by the 5 wt.% Ga-doping.
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