Modal wavefront reconstruction based on Zernike polynomials for lateral shearing interferometry: comparisons of...

Area of Science:

• Optics and Photonics
• Interferometry
• Wavefront Sensing

Background:

• Wavefront reconstruction is crucial in optical metrology.
• Lateral shearing interferometry is a common technique for wavefront measurement.
• Existing modal methods have limitations in accuracy and applicability.

Purpose of the Study:

• To compare four modal methods for wavefront reconstruction from difference fronts.
• To identify the most accurate and versatile method for lateral shearing interferometry.
• To recommend an optimal method for wavefront reconstruction.

Main Methods:

• Theoretical analysis of four modal methods: Rimmer-Wyant, elliptical orthogonal transformation, numerical orthogonal transformation, and difference Zernike polynomial fitting.
• Numerical experiments to evaluate method performance.
• Comparison based on accuracy, implementation, extensibility, and applicability.

Main Results:

• The difference Zernike polynomial fitting method demonstrated superior performance compared to the other three methods.
• This method exhibits high accuracy and is easy to implement.
• It is readily extendable to higher orders and applicable to arbitrary aperture shapes.

Conclusions:

• The difference Zernike polynomial fitting method is the recommended approach for wavefront reconstruction in lateral shearing interferometry.
• Its accuracy, flexibility, and ease of use make it advantageous.
• This method enhances the reliability of wavefront measurements.