Updated: May 19, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
1National Key Laboratory of Science and Technology on Tunable Laser, Harbin Institute of Technology, Harbin, China.
A new terahertz (THz) Gabor in-line digital holography system achieves high-resolution imaging. This system, utilizing a CO2 laser and pyroelectric camera, demonstrates real-time imaging capabilities with a lateral resolution exceeding 0.2 mm.
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