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Related Experiment Video

Updated: May 19, 2026

Finite Element Modelling of a Cellular Electric Microenvironment

Finite Element Modelling of a Cellular Electric Microenvironment

Published on: May 18, 2021

An improved lumped element nonlinear circuit model for a circular CMUT cell.

Hayrettin Köymen¹, Abdullah Atalar, Elif Aydoğdu

¹Electrical and Electronics Engineering Department, Bilkent University, Ankara, Turkey. koymen@ee.bilkent.edu.tr

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

|August 18, 2012

Summary

This study refines the large signal equivalent circuit model for capacitive micromachined ultrasonic transducer (CMUT) cells. The enhanced model accurately predicts CMUT behavior, including collapse conditions, until membrane-substrate contact.

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Area of Science:

Microelectromechanical Systems (MEMS)
Ultrasonic Transducers
Circuit Modeling

Background:

Existing large signal equivalent circuit models for circular capacitive micromachined ultrasonic transducer (CMUT) cells have limitations.
Accurate modeling is crucial for predicting CMUT performance, especially near collapse conditions.

Purpose of the Study:

To present a corrected and extended large signal equivalent circuit model for circular CMUT cells.
To ensure energy and power preservation within the equivalent circuit model.
To accurately predict CMUT behavior up to membrane-substrate contact.

Main Methods:

Rederiving the force model to preserve energy and power in the equivalent circuit.
Developing a model capable of predicting the entire CMUT behavior until membrane contact.
Deriving the small signal equivalent circuit from the large signal model for any bias condition.

Main Results:

The enhanced model accurately predicts CMUT behavior, including collapse condition and voltage.
It describes the voltage-displacement interrelation and force equilibrium before and after collapse.
Model predictions show excellent agreement with finite element method (FEM) simulations.

Conclusions:

The corrected and extended large signal model provides a comprehensive tool for CMUT analysis.
The model facilitates the prediction of critical CMUT parameters and behavior.
It is readily implementable in circuit simulation tools for design and analysis.