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Fabrication of Surface Acoustic Wave Devices on Lithium Niobate
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Fabrication of Surface Acoustic Wave Devices on Lithium Niobate

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Lithium-niobate-based surface acoustic wave oscillator directly integrated with CMOS sustaining amplifier

Shuji Tanaka1, KyeongDong Park, Masayoshi Esashi

  • 1Department of Nanomechanics, Tohoku University, Sendai, Japan. tanaka@mems.mech.tohoku.ac.jp

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|August 18, 2012
PubMed

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