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Imprint lithography with degradable elastomeric polyanhydrides.

Qin Lou1, Devon A Shipp

  • 1Department of Chemistry and Biomolecular Science and Center for Advanced Materials Processing, Clarkson University, Potsdam, New York 13699-5810, USA.

ACS Applied Materials & Interfaces
|August 22, 2012
PubMed
Summary
This summary is machine-generated.

Researchers developed a new photocurable, degradable polyanhydride elastomer for imprint lithography stamps. These thiol-ene polymerized stamps offer a reusable, water-degradable alternative for fabricating high-uniformity replicas.

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Area of Science:

  • Materials Science
  • Polymer Chemistry
  • Nanofabrication

Background:

  • Imprint lithography is a key technique for micro- and nanofabrication.
  • Current stamp materials often lack degradability, posing challenges in replica release and reusability.
  • Development of advanced, functional stamp materials is crucial for improving lithography processes.

Purpose of the Study:

  • To develop a novel photocurable and degradable polyanhydride elastomer for imprint lithography stamps.
  • To investigate the synthesis and performance of these stamps as sacrificial templates.
  • To evaluate the imprint quality and material properties of the developed polyanhydride stamps.

Main Methods:

  • Synthesis of degradable polyanhydride elastomers via thiol-ene polymerization.
  • Curing monomers (4-pentenoic anhydride and pentaerythritol tetrakis(3-mercaptopropionate)) on a master mold.
  • Utilizing the resulting stamps as sacrificial templates for replica fabrication and subsequent water-based degradation.

Main Results:

  • Successfully fabricated low-modulus, elastomeric, and degradable polyanhydride polymer stamps.
  • Achieved excellent uniformity over large areas in the imprinted materials.
  • Demonstrated effective degradation of stamps using water, simplifying replica release.

Conclusions:

  • Thiol-ene polymerized polyanhydrides offer a promising alternative for imprint lithography stamp materials.
  • These stamps exhibit advantages including degradability, master mold safety, excellent release, fast curing, and cost-effectiveness.
  • The developed materials are versatile and can be fabricated onto various substrates for diverse applications.