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Microgradient-heaters as tools for high-throughput experimentation.

Robert Meyer¹, Sven Hamann, Michael Ehmann

¹Institute for Materials, ‡Materials Research Department, and §Inorganic Chemistry II, Faculty of Chemistry and Biochemistry, Ruhr-Universität Bochum , 44801 Bochum, Germany.

ACS Combinatorial Science

|August 31, 2012

Summary

This summary is machine-generated.

A novel microgradient-heater (MGH) enables combinatorial thermal processing for materials science. This tool facilitates high-throughput experimentation and provides insights into film growth dynamics.

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Area of Science:

Materials Science
Nanotechnology
Chemical Engineering

Background:

Microhot plate (MHP) systems are established tools for materials research.
High-throughput experimentation requires advanced thermal processing capabilities.
Controlling temperature gradients at the micro/nanoscale is crucial for materials synthesis.

Purpose of the Study:

To develop and validate a microgradient-heater (MGH) for high-throughput materials science.
To demonstrate the MGH's capability for combinatorial thermal processing.
To explore the MGH's potential for microcalorimetry.

Main Methods:

Development of a microgradient-heater (MGH) based on microhot plate (MHP) technology.
Characterization of temperature gradients on an Au-coated MGH membrane (605 °C to 100 °C over 965 μm).
Application of MGH for chemical vapor deposition (CVD) of TiO2 films.

Main Results:

Achieved an average temperature change of 0.52 K/μm.
Demonstrated discontinuous changes in TiO2 film surface morphology.
Validated the MGH as a tool for combinatorial thermal processing.

Conclusions:

The microgradient-heater (MGH) is a feasible tool for high-throughput materials science.
MGHs enable precise control over thermal gradients for micronano-scale processing.
MGHs offer potential for microcalorimetry and understanding film growth energetics.