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Updated: May 19, 2026

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
Published on: August 15, 2014
Adaptive feed-forward hysteresis compensation for piezoelectric actuators
Arnfinn Aas Eielsen1, Jan Tommy Gravdahl, Kristin Y Pettersen
1Department of Engineering Cybernetics, Norwegian University of Science and Technology, Trondheim, Norway. arnfinn.aas.eielsen@itk.ntnu.no
Abstract:
Piezoelectric actuators are often employed for high-resolution positioning tasks. Hysteresis and creep nonlinearities inherent in such actuators deteriorate positioning accuracy. An online adaptive nonlinear hysteresis compensation scheme for the case of symmetric hysteretic responses and certain periodic reference trajectories is presented. The method has low complexity and is well suited for real-time implementation. Experimental results are presented in order to verify the method, and it is seen that the error due to hysteresis is reduced by more than 90% compared to when assuming a linear response.
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