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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
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Autofocusing of digital holographic microscopy based on off-axis illuminations

Peng Gao1, Baoli Yao, Junwei Min

  • 1State Key Laboratory of Transient Optics and Photonics, Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi'an 710119, China.

Optics Letters
|September 4, 2012
PubMed

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