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Updated: May 18, 2026

Operation of the Collaborative Composite Manufacturing (CCM) System
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Published on: October 1, 2019

X Y parallel compliant stage with compact configuration.

Kee-Bong Choi1, Jae Jong Lee, Gee Hong Kim

  • 1Nano Convergence and Manufacturing Systems Research Division, Korea Institute of Machinery and Materials, Daejeon 305-343, South Korea.

Journal of Nanoscience and Nanotechnology
|September 13, 2012
PubMed
Summary
This summary is machine-generated.

This study introduces a novel piezo-driven compliant stage for precise nano positioning. The developed stage offers two-degree-of-freedom parallel linear motion, crucial for advancing nanotechnologies.

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Area of Science:

  • Mechanical Engineering
  • Nanotechnology
  • Mechatronics

Background:

  • Nano positioning is critical for nanotechnology advancements.
  • Flexure-based compliant stages driven by piezo-actuators are key for achieving nano positioning.
  • Compact and efficient stage designs are needed for practical applications.

Purpose of the Study:

  • To present a novel piezo-driven compliant stage for two-degree-of-freedom nano positioning.
  • To design and analyze a compact, two-layered compliant mechanism for enhanced motion control.
  • To experimentally validate the performance of the developed nano positioning stage.

Main Methods:

  • Design and analysis of a two-layered compliant mechanism with motion guide and displacement amplification layers.
  • Machining of the compliant mechanisms using wire electro-discharge machining.
  • Integration of stack-type piezoelectric actuators and capacitive sensors for actuation and measurement.
  • Experimental testing to evaluate the stage's nano positioning performance.

Main Results:

  • A piezo-driven compliant stage with two-degree-of-freedom parallel linear motion was successfully developed.
  • The stage design features a compact, two-layered compliant mechanism for motion guidance and displacement amplification.
  • Experimental results demonstrated the effective performance of the stage for ultra-precision displacement measurement and actuation.

Conclusions:

  • The developed piezo-driven compliant stage is suitable for high-precision nano positioning applications.
  • The two-layered compliant mechanism design offers a compact and effective solution for parallel linear motion.
  • This work contributes to the advancement of precision engineering for nanotechnology.