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Updated: May 18, 2026

Quantitative Hardness Measurement by Instrumented AFM-indentation
Published on: November 22, 2016
Hardness variation with indenter sharpness in an Au thin-film
Yun-Hee Lee1, Yong-Il Kim, Jun-Hee Hahn
1Division of Industrial Metrology, Korea Research Institute of Standards and Science, Daejeon 305-340, Republic of Korea.
Indenter shape significantly impacts nanoindentation hardness measurements. Correcting for indenter sharpness ensures accurate hardness values for thin films, crucial for material characterization.
Area of Science:
- Materials Science
- Nanotechnology
- Mechanical Engineering
Background:
- Nanoindentation is a key technique for measuring mechanical properties of thin films.
- Indenter geometry, particularly its sharpness, can influence measured hardness values.
- Variations in indenter shape due to usage can introduce errors in nanoindentation testing.
Purpose of the Study:
- To investigate the effect of indenter shape on hardness measurements in thin-film nanoindentation.
- To develop and validate a method for correcting nanoindentation data based on indenter sharpness.
- To determine the intrinsic hardness of a gold thin film independent of indenter geometry.
Main Methods:
- Preparation and morphological characterization of two Berkovich indenters with different sharpness using atomic force microscopy.
- Performing nanoindentation tests on a 1.2 micrometer-thick gold thin film using both indenters.
- Analyzing nanoindentation load-displacement data and applying an indenter sharpness correction parameter.
Main Results:
- Blunter indenters resulted in higher peak indentation loads at equivalent depths compared to sharper indenters.
- Correction using the indenter sharpness parameter led to overlapping load-displacement curves.
- Consistent hardness values were obtained regardless of indenter sharpness, with only a 0.6% difference.
Conclusions:
- Indenter sharpness is a critical factor that must be accounted for in nanoindentation, especially at shallow depths.
- The developed correction method effectively normalizes data, yielding reliable intrinsic hardness values.
- Accurate material property characterization requires careful consideration and correction of indenter geometry effects.
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