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3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry
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Detection of a large valley-orbit splitting in silicon with two-donor spectroscopy

B Roche1, E Dupont-Ferrier, B Voisin

  • 1SPSMS, UMR-E CEA / UJF-Grenoble 1, INAC, 17 rue des Martyrs, 38054 Grenoble, France.

Physical Review Letters
|September 26, 2012
PubMed

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