Chemical vapour deposition of amorphous Ru(P) thin films from Ru trialkylphosphite hydride complexes

W Jeffrey McCarty1, Xiaoping Yang, Lauren J DePue Anderson

  • 1Department of Chemistry and Biochemistry, The University of Texas at Austin, Welch Hall 2.204, 105 E. 24th St. STOP A5300, Austin, Texas 78712-1224, USA.