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Updated: May 18, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Digital holographic microscope with low-frequency attenuation filter for position measurement of a nanoparticle
Quang Duc Pham1, Yuichi Kusumi, Satoshi Hasegawa
1Center for Optical Research & Education (CORE), Utsunomiya University, 7-1-2 Yoto, Utsunomiya 321-8585, Japan.
Abstract:
We propose a new method for three-dimensional (3D) position measurement of nanoparticles using an in-line digital holographic microscope. The method improves the signal-to-noise ratio of the amplitude of the interference fringes to achieve higher accuracy in the position measurement by increasing weak scattered light from a nanoparticle relative to the reference light by using a low spatial frequency attenuation filter. We demonstrated the improvements of signal-to-noise ratio of the optical system and contrast of the interference fringes, allowing the 3D positions of nanoparticles to be determined more precisely.

