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Updated: Jun 11, 2026
Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
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Digital holography (DH) using a linear imager, known as linear DH (LDH), is proposed for detecting the complex-amplitude image of a laterally moving object. The one-dimensional (1D) Fourier transform method and 1D diffraction calculation are applied to obtain the complex amplitude. The main advantage of the LDH is low computational cost and high measurement throughput. The two-dimensional shape of the object can be measured as it moves in a direction perpendicular to the sensor's direction at a known constant speed.
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