Transmission Electron Microscopy
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Updated: May 18, 2026

Use of Sacrificial Nanoparticles to Remove the Effects of Shot-noise in Contact Holes Fabricated by E-beam Lithography
Published on: February 12, 2017
Haimei Zheng1, Utkur M Mirsaidov, Lin-Wang Wang
1Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA. hmzheng@lbl.gov
Electron beams can trap and move gold nanoparticles within an environmental cell. This study quantifies the trapping force and demonstrates nanoparticle collection and assembly using electron beam manipulation.
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