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Sub-wavelength GaN-based membrane high contrast grating reflectors.

Tzeng Tsong Wu1, Yu Cheng Syu, Shu Hsien Wu

  • 1Department of Photonics & Institute of Electro-Optical Engineering, National Chiao Tung University, Hsinchu 30050, Taiwan.

Optics Express
|October 6, 2012
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Summary

Researchers fabricated Gallium Nitride (GaN)-based membrane high contrast gratings (HCGs) for enhanced light reflection. Optimized designs achieved high reflectivity and broad bandwidth, aiding novel GaN light-emitting device development.

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Area of Science:

  • Materials Science
  • Optoelectronics
  • Nanotechnology

Background:

  • High contrast gratings (HCGs) are crucial optical components.
  • Gallium Nitride (GaN) is a key material for optoelectronic devices.

Purpose of the Study:

  • To design and fabricate efficient GaN-based membrane HCG reflectors.
  • To achieve high reflectivity with a broad bandwidth for optical applications.

Main Methods:

  • Rigorous Coupled-Wave Analysis (RCWA) and Finite-Difference Time-Domain (FDTD) methods for optical simulation.
  • E-beam lithography and focused-ion beam (FIB) processes for fabrication.
  • Micro-reflectivity spectroscopy for experimental characterization.

Main Results:

  • Optimized structural parameters for GaN-based membrane HCGs were determined.
  • Fabricated HCGs demonstrated high reflectivity at 460 nm.
  • A large stopband width of 60 nm was achieved for TE polarization.
  • Experimental results closely matched simulation predictions.

Conclusions:

  • Successful fabrication of GaN-based membrane HCG reflectors with excellent optical performance.
  • The study provides a foundation for developing advanced GaN-based light-emitting devices.
  • Potential applications in blue and UV optoelectronics.