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Study of hybrid driven micromirrors for 3-D variable optical attenuator applications
Kah How Koh1, Bo Woon Soon, Julius Minglin Tsai
1Department of Electrical & Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore 117576, Singapore.
Optics Express
|October 6, 2012
Summary
This study demonstrates a novel hybrid-actuated MEMS variable optical attenuator using electrothermal and electromagnetic forces for 3-D applications. This innovative design offers a new approach to optical attenuation control.
Area of Science:
- Optoelectronics
- Microelectromechanical Systems (MEMS)
Background:
- Aluminium-coated micromirrors are utilized for 3-D variable optical attenuation.
- Electrothermal (ET) and electromagnetic (EM) actuation methods have been explored for micromirror control.
Purpose of the Study:
- To develop and characterize novel attenuation schemes for 3-D variable optical attenuators (VOAs).
- To investigate the impact of actuator design variations on VOA performance.
- To demonstrate a hybrid actuation approach combining ET and EM forces.
Main Methods:
- Fabrication of two distinct micromirror designs with integrated ET and EM actuators.
- Characterization of optical attenuation performance under different actuation schemes.
- Development of a hybrid actuation scheme utilizing both ET and EM actuators simultaneously.
Main Results:
- Demonstration of three attenuation schemes: electrothermal, electromagnetic, and hybrid.
- Investigation into the effects of actuator design on optical attenuation.
- Successful implementation of a hybrid-driven MEMS VOA, a first-of-its-kind device.
Conclusions:
- The hybrid actuation scheme offers a unique approach for MEMS VOAs.
- The developed device is CMOS compatible, paving the way for integrated optical systems.
- This work advances the field of 3-D variable optical attenuation using MEMS technology.
