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Published on: July 2, 2012
Profile estimation for Pt submicron wire on rough Si substrate from experimental data
Mirza Karamehmedović1, Poul-Erik Hansen, Kai Dirscherl
1Department of Process and Chemical Engineering, University of Bremen, Badgasteiner Str. 3, D-28359 Bremen, Germany. mirza@iwt.uni-bremen.de
Abstract:
An efficient forward scattering model is constructed for penetrable 2D submicron particles on rough substrates. The scattering and the particle-surface interaction are modeled using discrete sources with complex images. The substrate micro-roughness is described by a heuristic surface transfer function. The forward model is applied in the numerical estimation of the profile of a platinum (Pt) submicron wire on rough silicon (Si) substrate, based on experimental Bidirectional Reflectance Distribution Function (BRDF) data.
