Fabrication of nanoscale zero-mode waveguides using microlithography for single molecule sensing

Chu-Hsiang Teng1, Troy A Lionberger, Jin Zhang

  • 1Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, MI 48105, USA.

Nanotechnology
|October 23, 2012
PubMed
Summary

We developed a new, low-cost method for making zero-mode waveguides (ZMWs). This technique allows for quick fabrication of nanoapertures and successful single molecule detection with high signal quality.

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