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Updated: May 17, 2026

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Ohmic Contact Fabrication Using a Focused-ion Beam Technique and Electrical Characterization for Layer Semiconductor Nanostructures
Published on: December 5, 2015
Fabrication and characterization of nanostructured ZnO thin film microdevices by scanning electrochemical cell
Dongping Zhan1, Dezhi Yang, Yiliang Zhu
1Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, China. dpzhan@xmu.edu.cn
Abstract:
Scanning electrochemical cell microscopy (SECCM) was proven to be a prospective microfabrication method for the in situ synthesis and multiscale assembly of functional nanomaterials into microdevices. Nanostructured ZnO thin film was synthesized and assembled by SECCM, which has excellent electrochemical capacitance and electronic I-V properties.

