Rapid measurement of nanoparticle thickness profiles

A method to measure the thickness of a single-crystal nanoparticle in the direction parallel to the incident beam from annular dark field scanning transmission electron microscope (ADF-STEM) images is reported, providing a map of thickness versus position across the nanoparticle--a 'thickness profile' image. The method is rapid and hence suitable for surveying large numbers of nanoparticles. The method measures the intensity scattered to a characterised ADF detector and compares this to the incident beam intensity, to obtain a normalized ADF image. The normalised intensity is then converted to thickness via dynamical ADF image simulations. The method is accurate within 10% and the precision is dominated primarily by 'shot noise'. Merits and limitations of this method are discussed. A method to calibrate the response function of the ADF detector without external equipment is also described, which is applicable to the entire range of gain and background settings.