Novel approach to optical profiler with gradient focal point methods.

Henzeh Leeghim1, MyoungKi Ahn, Kwangsoo Kim

  • 1Display Equipment Team, Manufacturing Technology Center, Samsung Electronics Co., Ltd., Maetan 3-dong, Yeongtong-gu, Suwon-si, Gyeonggi-do, South Korea.

Optics Express
|November 29, 2012
PubMed
Summary

Novel gradient focal point (GFP) methods offer a single-shot solution for optical profilers. These techniques use unique lenses and sensors to quickly capture height information, providing a viable alternative to existing profilers.