Energetic-assisted scanning thermal lithography for patterning silver nanoparticles in polymer films

Chun-Min Huang1, Chung-Hsien Yeh, Lung Chen

  • 1Department of Materials Science and Engineering, National Cheng Kung University, Tainan, Taiwan.

Summary

Energetic-assisted scanning thermal lithography (SThL) uses benzoyl peroxide (BPO) to pattern silver nanoparticles in PMMA films. This method enhances nanoparticle synthesis and patterning efficiency through controlled exothermic decomposition.

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