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Overview of Microscopy Techniques
Atomic Force Microscopy
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Updated: May 16, 2026

Atom Probe Tomography Analysis of Exsolved Mineral Phases
Published on: October 25, 2019
T Philippe1, S Duguay, G Grancher
1Department of Materials Science and Engineering, Northwestern University, Evanston, IL 60208, USA.
Spatial point processes offer advanced statistical analysis for atom probe tomography (APT) data, enabling accurate atomic distribution assessment without sampling. These methods effectively analyze microelectronics materials, revealing chemical composition and cluster characteristics.
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